{"id":21347,"date":"2022-08-22T11:04:54","date_gmt":"2022-08-22T03:04:54","guid":{"rendered":"https:\/\/www.meetyoucarbide.com\/?p=21347"},"modified":"2022-08-22T11:05:00","modified_gmt":"2022-08-22T03:05:00","slug":"what-are-the-3-main-pvd-coating-methods","status":"publish","type":"post","link":"https:\/\/www.meetyoucarbide.com\/vi\/what-are-the-3-main-pvd-coating-methods\/","title":{"rendered":"3 ph\u01b0\u01a1ng ph\u00e1p ph\u1ee7 PVD ch\u00ednh l\u00e0 g\u00ec?"},"content":{"rendered":"
\n

L\u1edbp ph\u1ee7 l\u1eafng \u0111\u1ecdng h\u01a1i v\u1eadt l\u00fd l\u00e0 c\u00f4ng ngh\u1ec7 x\u1eed l\u00fd b\u1ec1 m\u1eb7t ti\u00ean ti\u1ebfn \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i tr\u00ean th\u1ebf gi\u1edbi. Nguy\u00ean t\u1eafc l\u00e0m vi\u1ec7c c\u1ee7a n\u00f3 l\u00e0 s\u1eed d\u1ee5ng s\u1ef1 ph\u00f3ng kh\u00ed \u0111\u1ec3 ion h\u00f3a m\u1ed9t ph\u1ea7n kh\u00ed ho\u1eb7c ch\u1ea5t bay h\u01a1i trong \u0111i\u1ec1u ki\u1ec7n ch\u00e2n kh\u00f4ng, v\u00e0 l\u1eafng \u0111\u1ecdng ch\u1ea5t bay h\u01a1i ho\u1eb7c ch\u1ea5t ph\u1ea3n \u1ee9ng c\u1ee7a n\u00f3 tr\u00ean \u0111\u1ebf trong khi c\u00e1c ion kh\u00ed ho\u1eb7c ion ch\u1ea5t bay h\u01a1i b\u1eafn ph\u00e1. Hi\u1ec7n nay, c\u00f4ng ngh\u1ec7 PVD \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u1ea5t tr\u00ean th\u1ecb tr\u01b0\u1eddng ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c chia th\u00e0nh ba lo\u1ea1i: ph\u00fan x\u1ea1 magnetron, m\u1ea1 ion \u0111a h\u1ed3 quang v\u00e0 l\u1eafng \u0111\u1ecdng h\u01a1i.<\/p>\n\n\n\n

Ph\u1ee7 ph\u00fan x\u1ea1 Magnetron PVD<\/h2>\n\n\n\n

Nguy\u00ean t\u1eafc l\u00e0m vi\u1ec7c: c\u00e1c electron va ch\u1ea1m v\u1edbi c\u00e1c nguy\u00ean t\u1eed argon trong qu\u00e1 tr\u00ecnh t\u0103ng t\u1ed1c \u0111\u1ebfn ch\u1ea5t n\u1ec1n d\u01b0\u1edbi t\u00e1c d\u1ee5ng c\u1ee7a \u0111i\u1ec7n tr\u01b0\u1eddng, l\u00e0m ion h\u00f3a m\u1ed9t s\u1ed1 l\u01b0\u1ee3ng l\u1edbn c\u00e1c ion v\u00e0 electron argon, v\u00e0 c\u00e1c electron bay \u0111\u1ebfn ch\u1ea5t n\u1ec1n. C\u00e1c ion argon t\u0103ng t\u1ed1c qu\u00e1 tr\u00ecnh b\u1eafn ph\u00e1 m\u1ee5c ti\u00eau d\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng c\u1ee7a \u0111i\u1ec7n tr\u01b0\u1eddng, v\u00e0 m\u1ed9t s\u1ed1 l\u01b0\u1ee3ng l\u1edbn c\u00e1c nguy\u00ean t\u1eed m\u1ee5c ti\u00eau b\u1ecb v\u0103ng ra ngo\u00e0i v\u00e0 l\u1eafng \u0111\u1ecdng tr\u00ean b\u1ec1 m\u1eb7t c\u1ee7a l\u1edbp c\u01a1 s\u1edf \u0111\u1ec3 t\u1ea1o th\u00e0nh m\u1ed9t l\u1edbp m\u00e0ng.<\/p>\n\n\n\n

\u0110\u1eb7c \u0111i\u1ec3m c\u1ee7a l\u1edbp ph\u1ee7 ph\u00fan x\u1ea1<\/h3>\n\n\n\n

(1) h\u1ea1t nh\u1ecf<\/p>\n\n\n\n

L\u1edbp ph\u1ee7 ph\u00fan x\u1ea1 c\u00f3 th\u1ec3 l\u00e0m cho c\u00e1c h\u1ea1t m\u00e0ng m\u1ecbn, ph\u00f9 h\u1ee3p v\u1edbi l\u1edbp ph\u1ee7 quang h\u1ecdc<\/p>\n\n\n\n

(2) t\u1ef7 l\u1ec7 l\u1eafng \u0111\u1ecdng th\u1ea5p<\/p>\n\n\n\n

L\u1edbp ph\u1ee7 ph\u00fan x\u1ea1 kh\u00f4ng ph\u00f9 h\u1ee3p v\u1edbi l\u1edbp ph\u1ee7 c\u00f4ng nghi\u1ec7p v\u00ec t\u1ed1c \u0111\u1ed9 l\u1eafng \u0111\u1ecdng th\u1ea5p v\u00e0 hi\u1ec7u qu\u1ea3 th\u1ea5p<\/p>\n\n\n\n

(3) l\u1edbp ph\u1ee7 \u0111\u1ed3ng nh\u1ea5t<\/p>\n\n\n\n

L\u1edbp ph\u1ee7 ph\u00fan x\u1ea1 c\u00f3 c\u00e1c \u0111\u1eb7c t\u00ednh c\u1ee7a c\u00e1c h\u1ea1t nh\u1ecf v\u00e0 l\u1eafng \u0111\u1ecdng ch\u1eadm, v\u00e0 l\u1edbp ph\u1ee7 c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c v\u1edbi ch\u1ebf \u0111\u1ed9 t\u1ea3i ph\u00f9 h\u1ee3p<\/p>\n\n\n\n

(4) l\u1ef1c li\u00ean k\u1ebft cao<\/p>\n\n\n\n

So v\u1edbi l\u1edbp ph\u1ee7 truy\u1ec1n th\u1ed1ng, l\u1edbp ph\u1ee7 ph\u00fan x\u1ea1 c\u00f3 \u0111\u1ed9 b\u00e1m d\u00ednh cao h\u01a1n v\u1edbi b\u1ec1 m\u1eb7t<\/p>\n\n\n\n

(5) quy tr\u00ecnh ph\u1ee9c t\u1ea1p<\/p>\n\n\n\n

L\u1edbp ph\u1ee7 ph\u00fan x\u1ea1 y\u00eau c\u1ea7u c\u1ea5u h\u00ecnh cao h\u01a1n<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

L\u1edbp ph\u1ee7 ion \u0111a h\u1ed3 quang<\/h2>\n\n\n\n

Nguy\u00ean t\u1eafc l\u00e0m vi\u1ec7c: ph\u01b0\u01a1ng ph\u00e1p ph\u00f3ng \u0111i\u1ec7n h\u1ed3 quang \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 l\u00e0m bay h\u01a1i tr\u1ef1c ti\u1ebfp kim lo\u1ea1i tr\u00ean m\u1ee5c ti\u00eau cat\u1ed1t r\u1eafn. V\u1eadt li\u1ec7u bay h\u01a1i l\u00e0 c\u00e1c ion c\u1ee7a v\u1eadt li\u1ec7u c\u1ef1c \u00e2m ph\u00e1t ra t\u1eeb \u0111i\u1ec3m s\u00e1ng c\u1ee7a h\u1ed3 quang c\u1ef1c \u00e2m, sau \u0111\u00f3 l\u1eafng \u0111\u1ecdng tr\u00ean b\u1ec1 m\u1eb7t c\u1ee7a \u0111\u1ebf d\u01b0\u1edbi d\u1ea1ng m\u00e0ng m\u1ecfng.<\/p>\n\n\n\n

B\u1eb1ng c\u00e1ch k\u1ebft h\u1ee3p ph\u00f3ng \u0111i\u1ec7n ph\u00e1t s\u00e1ng, c\u00f4ng ngh\u1ec7 plasma v\u00e0 bay h\u01a1i ch\u00e2n kh\u00f4ng, m\u1ea1 ion kh\u00f4ng ch\u1ec9 c\u00f3 th\u1ec3 c\u1ea3i thi\u1ec7n ch\u1ea5t l\u01b0\u1ee3ng phim m\u00e0 c\u00f2n m\u1edf r\u1ed9ng ph\u1ea1m vi \u1ee9ng d\u1ee5ng c\u1ee7a phim.<\/p>\n\n\n\n

\u0110\u1eb7c \u0111i\u1ec3m c\u1ee7a l\u1edbp ph\u1ee7 h\u1ed3 quang<\/h3>\n\n\n\n

(1) hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t cao h\u01a1n<\/p>\n\n\n\n

(2) n\u0103ng l\u01b0\u1ee3ng ion \u0111\u01a1n l\u1ebb c\u1ee7a l\u1edbp ph\u1ee7 h\u1ed3 quang c\u00f3 th\u1ec3 l\u00e0m cho l\u1edbp ph\u1ee7 b\u00e1m ch\u1eafc tr\u00ean b\u1ec1 m\u1eb7t \u0111\u1ebf<\/p>\n\n\n\n

(3) quy tr\u00ecnh \u1ed5n \u0111\u1ecbnh, c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c s\u1ef1 ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c h\u01a1n tr\u00ean l\u1edbp ph\u1ee7 composite\"\"<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

l\u1edbp ph\u1ee7 l\u1eafng \u0111\u1ecdng h\u01a1i<\/h2>\n\n\n\n

Nguy\u00ean t\u1eafc l\u00e0m vi\u1ec7c: trong \u0111i\u1ec1u ki\u1ec7n ch\u00e2n kh\u00f4ng, v\u1eadt li\u1ec7u ph\u1ee7 (ho\u1eb7c v\u1eadt li\u1ec7u m\u00e0ng) \u0111\u01b0\u1ee3c l\u00e0m bay h\u01a1i v\u00e0 kh\u00ed h\u00f3a b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p gia nhi\u1ec7t v\u00e0 bay h\u01a1i nh\u1ea5t \u0111\u1ecbnh, v\u00e0 c\u00e1c h\u1ea1t bay l\u00ean b\u1ec1 m\u1eb7t \u0111\u1ebf \u0111\u1ec3 t\u1ea1o th\u00e0nh m\u00e0ng.<\/p>\n\n\n\n

vapor deposition coating’s characteristics<\/h3>\n\n\n\n

(1) quy tr\u00ecnh \u0111\u01a1n gi\u1ea3n, c\u00f4ng ngh\u1ec7 tr\u01b0\u1edfng th\u00e0nh v\u00e0 \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i<\/p>\n\n\n\n

(2) n\u00f3 kh\u00f4ng ph\u00f9 h\u1ee3p v\u1edbi v\u1eadt li\u1ec7u c\u00f3 \u0111i\u1ec3m n\u00f3ng ch\u1ea3y cao v\u00e0 v\u1eadt li\u1ec7u c\u00f3 \u0111\u1ed9 c\u1ee9ng th\u1ea5p, v\u00e0 n\u00f3 kh\u00f4ng ph\u00f9 h\u1ee3p \u0111\u1ec3 s\u1ea3n xu\u1ea5t quy m\u00f4 l\u1edbn v\u00ec th\u1eddi gian ph\u1ee7 ch\u1eadm<\/p>\n\n\n\n

Hi\u1ec7u su\u1ea5t c\u1ee7a l\u1edbp ph\u1ee7 PVD<\/h2>\n\n\n\n

So v\u1edbi c\u00e1c c\u00f4ng ngh\u1ec7 t\u0103ng c\u01b0\u1eddng b\u1ec1 m\u1eb7t truy\u1ec1n th\u1ed1ng, ch\u1eb3ng h\u1ea1n nh\u01b0 m\u1ea1 \u0111i\u1ec7n, m\u1ea1 \u0111i\u1ec7n ph\u00e2n v\u00e0 x\u1eed l\u00fd nhi\u1ec7t h\u00f3a h\u1ecdc, l\u1edbp ph\u1ee7 PVD c\u00f3 hi\u1ec7u su\u1ea5t b\u00e1m d\u00ednh t\u1ed1t, ch\u1ea5t l\u01b0\u1ee3ng l\u1edbp ph\u1ee7 t\u1ed1t, nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u m\u1ea1 v\u00e0 \u0111\u1ed9 d\u00e0y c\u1ee7a m\u00e0ng l\u00e0 micron. Do \u0111\u00f3, c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt l\u00fd v\u00e0 h\u00f3a h\u1ecdc kh\u00e1c nhau c\u1ee7a b\u1ec1 m\u1eb7t ph\u00f4i c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n m\u00e0 kh\u00f4ng \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn k\u00edch th\u01b0\u1edbc ban \u0111\u1ea7u c\u1ee7a ph\u00f4i. Ngo\u00e0i vi\u1ec7c m\u1ea1 phi kim lo\u1ea1i ho\u1eb7c kim lo\u1ea1i tr\u00ean ph\u00f4i kim lo\u1ea1i, PVD c\u0169ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c m\u1ea1 kim lo\u1ea1i ho\u1eb7c phi kim lo\u1ea1i tr\u00ean phi kim lo\u1ea1i, ho\u1eb7c th\u1eadm ch\u00ed l\u00e0 nh\u1ef1a, cao su, th\u1ea1ch anh, g\u1ed1m, v.v., \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c c\u00e1c ch\u1ee9c n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n, gi\u1ea3m ma s\u00e1t, ch\u1ed1ng \u0103n m\u00f2n, ch\u1ed1ng g\u1ec9, ch\u1ecbu nhi\u1ec7t v\u00e0 ch\u1ed1ng oxi h\u00f3a.<\/p>\n\n\n\n

Theo nhi\u1ec1u th\u1ed1ng k\u00ea, vi\u1ec7c s\u1eed d\u1ee5ng h\u1ea1t dao ph\u1ee7 PVD kh\u00f4ng ch\u1ec9 gi\u1ea3m s\u1eed d\u1ee5ng ch\u1ea5t th\u00e1o khu\u00f4n, chi ph\u00ed nh\u00e2n c\u00f4ng v\u00e0 th\u1eddi gian thay khu\u00f4n m\u00e0 c\u00f2n c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 s\u1ea3n l\u01b0\u1ee3ng v\u00e0 n\u0103ng su\u1ea5t, mang \u0111\u1ebfn gi\u1ea3i ph\u00e1p hi\u1ec7u qu\u1ea3 cho doanh nghi\u1ec7p nh\u1eb1m t\u0103ng hi\u1ec7u qu\u1ea3 v\u00e0 gi\u1ea3m chi ph\u00ed, ti\u1ebft ki\u1ec7m chi ph\u00ed n\u0103ng l\u01b0\u1ee3ng v\u00e0 gi\u1ea3m thi\u1ec3u \u00f4 nhi\u1ec5m.<\/p>\n\n\n\n

<\/p>\n\n\n\n

<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"

Physical vapor deposition coating is an advanced surface treatment technology widely used in the world. Its working principle is to use gas discharge to partially ionize the gas or evaporated substance under vacuum conditions, and deposit the evaporated substance or its reactant on the substrate while the gas ions or evaporated substance ions bombard. At…<\/p>","protected":false},"author":2,"featured_media":21349,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[92],"tags":[],"jetpack_featured_media_url":"https:\/\/www.meetyoucarbide.com\/wp-content\/uploads\/2022\/08\/\u56fe\u72474-1.png","jetpack_sharing_enabled":true,"_links":{"self":[{"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/posts\/21347"}],"collection":[{"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/comments?post=21347"}],"version-history":[{"count":0,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/posts\/21347\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/media\/21349"}],"wp:attachment":[{"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/media?parent=21347"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/categories?post=21347"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/tags?post=21347"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}