{"id":21347,"date":"2022-08-22T11:04:54","date_gmt":"2022-08-22T03:04:54","guid":{"rendered":"https:\/\/www.meetyoucarbide.com\/?p=21347"},"modified":"2022-08-22T11:05:00","modified_gmt":"2022-08-22T03:05:00","slug":"what-are-the-3-main-pvd-coating-methods","status":"publish","type":"post","link":"https:\/\/www.meetyoucarbide.com\/vi\/what-are-the-3-main-pvd-coating-methods\/","title":{"rendered":"3 ph\u01b0\u01a1ng ph\u00e1p ph\u1ee7 PVD ch\u00ednh l\u00e0 g\u00ec?"},"content":{"rendered":"
L\u1edbp ph\u1ee7 l\u1eafng \u0111\u1ecdng h\u01a1i v\u1eadt l\u00fd l\u00e0 c\u00f4ng ngh\u1ec7 x\u1eed l\u00fd b\u1ec1 m\u1eb7t ti\u00ean ti\u1ebfn \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i tr\u00ean th\u1ebf gi\u1edbi. Nguy\u00ean t\u1eafc l\u00e0m vi\u1ec7c c\u1ee7a n\u00f3 l\u00e0 s\u1eed d\u1ee5ng s\u1ef1 ph\u00f3ng kh\u00ed \u0111\u1ec3 ion h\u00f3a m\u1ed9t ph\u1ea7n kh\u00ed ho\u1eb7c ch\u1ea5t bay h\u01a1i trong \u0111i\u1ec1u ki\u1ec7n ch\u00e2n kh\u00f4ng, v\u00e0 l\u1eafng \u0111\u1ecdng ch\u1ea5t bay h\u01a1i ho\u1eb7c ch\u1ea5t ph\u1ea3n \u1ee9ng c\u1ee7a n\u00f3 tr\u00ean \u0111\u1ebf trong khi c\u00e1c ion kh\u00ed ho\u1eb7c ion ch\u1ea5t bay h\u01a1i b\u1eafn ph\u00e1. Hi\u1ec7n nay, c\u00f4ng ngh\u1ec7 PVD \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u1ea5t tr\u00ean th\u1ecb tr\u01b0\u1eddng ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c chia th\u00e0nh ba lo\u1ea1i: ph\u00fan x\u1ea1 magnetron, m\u1ea1 ion \u0111a h\u1ed3 quang v\u00e0 l\u1eafng \u0111\u1ecdng h\u01a1i.<\/p>\n\n\n\n
Nguy\u00ean t\u1eafc l\u00e0m vi\u1ec7c: c\u00e1c electron va ch\u1ea1m v\u1edbi c\u00e1c nguy\u00ean t\u1eed argon trong qu\u00e1 tr\u00ecnh t\u0103ng t\u1ed1c \u0111\u1ebfn ch\u1ea5t n\u1ec1n d\u01b0\u1edbi t\u00e1c d\u1ee5ng c\u1ee7a \u0111i\u1ec7n tr\u01b0\u1eddng, l\u00e0m ion h\u00f3a m\u1ed9t s\u1ed1 l\u01b0\u1ee3ng l\u1edbn c\u00e1c ion v\u00e0 electron argon, v\u00e0 c\u00e1c electron bay \u0111\u1ebfn ch\u1ea5t n\u1ec1n. C\u00e1c ion argon t\u0103ng t\u1ed1c qu\u00e1 tr\u00ecnh b\u1eafn ph\u00e1 m\u1ee5c ti\u00eau d\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng c\u1ee7a \u0111i\u1ec7n tr\u01b0\u1eddng, v\u00e0 m\u1ed9t s\u1ed1 l\u01b0\u1ee3ng l\u1edbn c\u00e1c nguy\u00ean t\u1eed m\u1ee5c ti\u00eau b\u1ecb v\u0103ng ra ngo\u00e0i v\u00e0 l\u1eafng \u0111\u1ecdng tr\u00ean b\u1ec1 m\u1eb7t c\u1ee7a l\u1edbp c\u01a1 s\u1edf \u0111\u1ec3 t\u1ea1o th\u00e0nh m\u1ed9t l\u1edbp m\u00e0ng.<\/p>\n\n\n\n
(1) h\u1ea1t nh\u1ecf<\/p>\n\n\n\n
L\u1edbp ph\u1ee7 ph\u00fan x\u1ea1 c\u00f3 th\u1ec3 l\u00e0m cho c\u00e1c h\u1ea1t m\u00e0ng m\u1ecbn, ph\u00f9 h\u1ee3p v\u1edbi l\u1edbp ph\u1ee7 quang h\u1ecdc<\/p>\n\n\n\n
(2) t\u1ef7 l\u1ec7 l\u1eafng \u0111\u1ecdng th\u1ea5p<\/p>\n\n\n\n
L\u1edbp ph\u1ee7 ph\u00fan x\u1ea1 kh\u00f4ng ph\u00f9 h\u1ee3p v\u1edbi l\u1edbp ph\u1ee7 c\u00f4ng nghi\u1ec7p v\u00ec t\u1ed1c \u0111\u1ed9 l\u1eafng \u0111\u1ecdng th\u1ea5p v\u00e0 hi\u1ec7u qu\u1ea3 th\u1ea5p<\/p>\n\n\n\n
(3) l\u1edbp ph\u1ee7 \u0111\u1ed3ng nh\u1ea5t<\/p>\n\n\n\n
L\u1edbp ph\u1ee7 ph\u00fan x\u1ea1 c\u00f3 c\u00e1c \u0111\u1eb7c t\u00ednh c\u1ee7a c\u00e1c h\u1ea1t nh\u1ecf v\u00e0 l\u1eafng \u0111\u1ecdng ch\u1eadm, v\u00e0 l\u1edbp ph\u1ee7 c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c v\u1edbi ch\u1ebf \u0111\u1ed9 t\u1ea3i ph\u00f9 h\u1ee3p<\/p>\n\n\n\n
(4) l\u1ef1c li\u00ean k\u1ebft cao<\/p>\n\n\n\n
So v\u1edbi l\u1edbp ph\u1ee7 truy\u1ec1n th\u1ed1ng, l\u1edbp ph\u1ee7 ph\u00fan x\u1ea1 c\u00f3 \u0111\u1ed9 b\u00e1m d\u00ednh cao h\u01a1n v\u1edbi b\u1ec1 m\u1eb7t<\/p>\n\n\n\n
(5) quy tr\u00ecnh ph\u1ee9c t\u1ea1p<\/p>\n\n\n\n
L\u1edbp ph\u1ee7 ph\u00fan x\u1ea1 y\u00eau c\u1ea7u c\u1ea5u h\u00ecnh cao h\u01a1n<\/p>\n\n\n\n